Automated Particle Analysis for ZEISS Scanning Electron Microscopes – This software package enables highly automated detection, investigation and analysis of samples

Carl Zeiss today introduced the Smart Particle Investigator (SmartPI™), a software package for use with ZEISS Scanning Electron Microscopes (SEM) that enables the automatic detection, investigation and characterisation of particles of interest.

SmartPI™ integrates all aspects of the SEM control, Image Processing and Energy Dispersive X-ray (EDX) analysis for particle detection and characterisation within a single application. A high degree of automation for repetitive sample analysis provides non-subjective results with minimal user involvement and enables continuous unattended operation of the instrument. Automated calibration and diagnostic procedures ensure results accuracy and system stability and an advanced stop-criteria allows early termination of the analysis if a predefined threshold is reached, thereby significantly reducing the analysis time.

The applications of Smart PI™ are virtually unlimited and include manufacturing cleanliness and quality control, wear analysis with failure prediction (e.g. oil analysis of jet engines), geological survey and mining, forensics, environmental monitoring and more.

Ease of use

Special attention has been given to ease of use. Due to the automated nature of SmartPI™ daily operation only requires an operator to load and unload samples and initiate the predefined analysis routines (recipes), however more experienced operators can create or modify recipes to meet their specific requirements. All recipes, system configuration and results data are stored in an auditable database to allow easy data review and export.

Border Particle Stitching

A special feature of the SmartPI™ package is the border particle stitching algorithm which determines the full characteristics and measurements of an individual particle which crosses multiple fields. Images of stitched particles can easily be saved and reviewed.

About Carl Zeiss SMT

Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing. As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France, the USA, Israel and Singapore, the international group of companies has over 2,500 employees. In fiscal year 2007/08, the wholly owned subsidiary of Carl Zeiss AG generated revenues of over EUR 1,000 million.

Further information: www.smt.zeiss.com