Bruker BEST Makes Acquisition

AIXUV GmbH makes gas discharge–based EUV lamps for laboratory applications, including high-resolution chemical analysis and thin film characterization, as well as for semiconductor lithography technology. The acquisition provides for technology synergies with Bruker AXS.

Bergisch Gladbach, Germany 3/15/10—Bruker’s Energy & Supercon Technologies (BEST), a subsidiary of Bruker, has acquired AIXUV GmbH, a developer of XUV/EUV (extreme ultraviolet) systems and components. XUV/EUV light allows chemically sensitive measurements with nanometer lateral resolution, according to Bruker. “This acquisition paves the way for the development of our business in new markets for scientific research and metrology in the extreme ultraviolet, or soft X-ray, spectral range,” commented Dr. Hans-Udo Klein, vice president of Business Development for BEST.

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