ASDevices Files Patents for New Sensing Technology Called MEID

ASDevices is pleased to reveal the filing of a new patent for the Metastable Emission Ionization Detector (MEID), a new revolutionary form of gas sensor aimed at both continuous and chromatographic applications. This new sensor will originally be used to measure ultra-trace H2O and O2 levels in the semiconductor and ultra-high purity markets. It will contend with cavity ring-down spectroscopy (CRDS), tunable diode laser spectroscopy (TDLS), and electrochemical cells, in addition to covering other applications such as VOC measurement and various elemental measurements currently done with ICP.

“The MEID is a new active research field for ASDevices. After researching in this area for a long time, we’re now aggressively pursuing this venture to strengthen our market position and offering. The MEID detector will soon become a reality thanks to recent work on our patented enhanced plasma discharge (EPD) source and other enabling technologies that we cannot reveal at this time. This detector will enable new analytical measurements and will benefit our clients in the semiconductor market, who are presently suffering from a lack of suitable alternative technologies for ultra-trace O2 and H2O analysis,” said ASDevices CEO Yves Gamache.

MEID technology employs a stabilized plasma source to produce metastables from argon, helium, nitrogen, or a combination thereof. ASDevices has decades of experience in producing highly stable plasma sources, which will significantly improve the performance of this technology. To ionize the impurities introduced into the measurement chamber, an extremely energetic metastable source is used. The metastable transmits energy inside the chamber by colliding with impurities. Excitation and ionization occur as a result of the impacts. Excitation of impurities causes particular emission wavelengths to be measured by selective optical filters. Ion collection is used to detect impurity ionization using our proven high-quality eSense electrometer.  The technology will use advanced algorithms to gather both qualitative and quantitative information to improve selectivity and sensitivity, by combining emission spectroscopy and current sensing. Because the sample matrix and carrier gas will not be ionized, the precision of this technology will be extremely beneficial. ASDevices plans to release its MEID technology in late 2023 or early 2024 (details to come).

MEID is a new field of research for ASDevices. As the industry leader in plasma-type gas sensing detectors, ASD will continue to invest heavily in this field to evolve its flagship Enhanced Plasma Discharge technology, which is now used by many customers worldwide due to its performance, configurability and to the possibility to use low-cost argon as a carrier gas instead of helium or flammable gas such as hydrogen. This year will see the introduction of new ASDevices detector variants based on their proprietary enhanced plasma discharge (EPD). ASDevices constantly seek out new ventures to maintain its market leadership.

About ASDevices

ASDevices is an international company specializing in analysis technologies and devices for process and laboratory gases. ASDevices helps organizations overcome their analytical challenges with robust, high-quality solutions. The company’s founders and partners have accumulated over 30 years of GC innovation and over 180 patents worldwide. ASDevices owns all the technologies it develops, and it’s the only company in the world to own all key process gas chromatography technologies related to the challenging measurement of fuel-cell grade hydrogen, especially trace sulfur analysis.

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