Carl Zeiss expands SIGMA FE-SEM platform

Variable pressure mode extends analytical capabilities

CAMBRIDGE/UK, OBERKOCHEN/Germany – Today, Carl Zeiss launches SIGMA VP, which adds variable pressure technology to the range of SIGMA field emission scanning electron microscopes (FE-SEM). Featuring the Carl Zeiss GEMINI® column, proven VP technology and a design with analytical accessories in mind, the SIGMA VP provides a comprehensive analytical solution for a constantly growing diversity of applications. The chamber includes the provision for all WDS variants as well as a geometry suitable for coplanar EDS and EBSD analysis. The SIGMA VP is compatible with a wealth of accessories including the Carl Zeiss BSD and VPSE G3 detectors, which provide exceptional imaging of non-conducting specimens.

The customer benefits of the SIGMA VP are a combination of outstanding flexibility and unrivalled ease of use with respect to both image acquisition and analytical applications. System control by means of SmartSEM®, the Carl Zeiss software package known for its intuitive interface, and the GEMINI column with user-friendly operation allow for excellent imaging by novices and experts alike.

With this launch Carl Zeiss further underlines its slogan: Maximum information – maximum insight.

About Carl Zeiss SMT

Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing. As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France, the USA, Israel and Singapore, the international group of companies has over 2,500 employees. In fiscal year 2007/08, the wholly owned subsidiary of Carl Zeiss AG generated revenues of over EUR 1,000 million.

Further information: www.smt.zeiss.com

Carl Zeiss expands SIGMA FE-SEM platform

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