AURIGA™ CrossBeam® Workstation Provides Advanced Analytics, Precise Processing of Samples, Unique Imaging, a Future-Assured Upgrade Path and More

OBERKOCHEN/Germany – March 25, 2009. Today, Carl Zeiss SMT introduced its newly developed AURIGA™ CrossBeam® (FIB-SEM) work-station. As one of the pioneers in developing this class of Information beyond resolution

instruments, and with more than 8 years of FIB-SEM experience, the company incorporated a huge number of innovations in the new AURIGA. Dr. Thomas Albrecht, Director Product Management, said: “Useful information about a sample goes far beyond just high resolution surface images. We focused on two major tasks during the development of this powerful new instrument: First, to make possible the analysis of a never-before-seen variety of samples, and second, to enable customers to obtain the maximum information possible from each sample. AURIGA – delivering much more than just an image – is the result of this quest.”

New chamber design and unique charge compensation system for advanced analytics

Chemical analysis, crystallographic information, the complete morphology, electrical information … the number and complexity of tasks required to obtain an extensive sample characterization on the nanometer scale is unlimited, as is the number and variety of samples. Therefore, flexibility is a must. In order to meet this requirement, AURIGA has a completely redesigned vacuum chamber, which now includes a total of 15 ports for different detectors. Additionally, an unrivaled charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods benefit from this technology, supporting numerous applications in materials analysis, life sciences and semiconductor technology.

Precise processing of samples by unique imaging

The very heart of the AURIGA CrossBeam® workstation is the proven GEMINI® FE-SEM column. Its special in-lens EsB detector offers images with excellent material contrast. Additionally, the design of the GEMINI column enables the analysis of magnetic samples. A feature unique to CrossBeam workstations from Carl Zeiss is simultaneous milling and high-resolution SEM imaging. To ensure optimal customer support, AURIGA incorporates a new high-resolution FIB with a top level resolution of 2.5 nm and better. Advanced gas processing technology for ion and e-beam assisted etching and deposition completes the unequalled sample processing capabilities of this new instrument.

About Carl Zeiss SMT

As the global leader in innovative lithography optics, as well as optical and particle-beam based systems for inspection, analysis and measuring, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and academic R&D. Decades of market leadership are based on the success of its leading know-how in light, electron and ion-optical technologies. Together with its subsidiaries in Germany, England, France, Singapore, Taiwan, Thailand, Israel and the USA, the international group of companies has more than 2,500 employees. In fiscal year 2007/08, Carl Zeiss SMT AG generated revenues of over EUR 1 billion (USD ~ 1.3 billion). Carl Zeiss SMT AG is a wholly owned subsidiary of Carl Zeiss AG.

Further information: www.smt.zeiss.com