Enhanced resolution in the low kv region with new electron source technology.

Cambridge, UK / Oberkochen, Germanay, – Today, Carl Zeiss introduces EVO® HD, its latest innovation in the conventional Scanning Electron Microscopy (C-SEM) market segment. Delivering much higher resolution at low acceleration voltages compared to present conventional SEM, the EVO® HD introduces High Definition to electron microscopy.

The technological basis for this achievement is the new EVO® HD source which features a higher source brightness. This brightness results in an improvement in resolution at low-kV relative to conventional tungsten SEMs. The improved source properties also aid analytical applications with a 30% increase in resolution at 30kV and 1nA.

“We are convinced that this is the most significant innovation in the market for conventional SEM in the last decade. Numerous applications in both life sciences and materials analysis will benefit from the increased performance”, explains Allister Mc Bride from Carl Zeiss Nano Technology Systems division at Cambridge.

Further information is available at www.smt.zeiss.com/evohd

Carl Zeiss

The Carl Zeiss Group is a leading group of companies operating worldwide in the optical and opto-electronic industries that generates revenues totaling around EUR 2.1 billion (2008/09). Carl Zeiss offers innovative solutions for the future-oriented markets of Medical and Research Solutions, Industrial Solutions and Lifestyle Products. The Carl Zeiss Group has approximately 13,000 employees worldwide, including more than 8,000 in Germany. The Carl Zeiss business groups hold leading positions in their markets. Carl Zeiss AG, Oberkochen, is fully owned by the Carl Zeiss Stiftung (Carl Zeiss Foundation).

Carl Zeiss SMT

Carl Zeiss SMT AG comprises the Semiconductor Technology Group of the Carl Zeiss Group. Carl Zeiss SMT is one of the leading manufacturers of lithography optics and light, electron and ion-optical inspection, analysis and measuring systems. The company offers a broad spectrum of application and service solutions for the fields of semiconductor technology, nanotechnology, materials research and life sciences. Carl Zeiss SMT AG is headquartered in Oberkochen, Germany. Other sites are located in Germany, the UK, France, the USA, Israel and Singapore. The company has a global workforce of over 2,500 people and generated revenues of just under EUR 400 million in fiscal year 2008/09. Carl Zeiss SMT AG is fully owned by Carl Zeiss AG, Oberkochen. Further information is available at www.smt.zeiss.com