HORIBA debuts new Raman microscope for semiconductor analyses
LabRAM Odyssey Semiconductor for semiconductors R&D process qualification and optimization
Paris Saclay, France — HORIBA France SAS, leader in Raman microscopy, announces the new LabRAM Odyssey Semiconductor system, a Raman/Photoluminescence microscope based on the best-selling high resolution LabRAM HR Evolution Confocal Raman Microscope and equipped with a sample mounting stage to handle the common wafer size of 300 mm.
As compound semiconductors are becoming more complex with a higher number of elements, uniformity assessment on blanket wafers is essential for high quality devices and high yield. The LabRAM Odyssey Semiconductor system will help process engineers qualify the different process steps in a timely manner and with a high level of confidence. With a high spatial resolution mode, the LabRAM Odyssey Semiconductor offers the capability to detect and identify defects and submicron inhomogeneities to understand and give insights about their origin.
The LabRAM Odyssey Semiconductor system includes a 300 mm × 300 mm automated sample stage and an automated objective turret, enabling the acquisition of maps of full wafers of diameter up of 300 mm. In addition, the DuoScan imaging function permits both variable size laser macrospot for full wafer maps and high spatial submicron step scanning for small area maps. The range of available excitation lasers, combined with a wide range of spectral detection, from deep UV to near IR, makes the LabRAM Odyssey Semiconductor system a two-in-one Raman and Photoluminescence spectroscopy tool. The “Tilt at midway” autofocus function overcomes possible sample/holder tilt and ensures reliability in uniformity response.
As Raman and Photoluminescence characterization is moving from the lab to the fab for the emerging 2D materials-based devices, the LabRAM Odyssey Semiconductor system is the perfect tool for metrology technical managers.
To learn more about the LabRAM Odyssey Semiconductor system visit here.
Founded in 1953, HORIBA has explored a wide range of unique measurement and analysis technologies to meet global customer needs from group companies and local sites spread across 28 counties and regions. Under the corporate motto Joy and Fun, the company has expanded and refined its core technologies to solve society’s energy issues of today and tomorrow. Our unique measurement and analysis technologies are valued in various fields of society including the three megatrend business fields of Energy & Environment, Biology & Healthcare and Materials & Semiconductor. For more information on HORIBA, visit here.
About HORIBA France
HORIBA France SAS, formely Jobin Yvon, established in 1819, and now part of the HORIBA Scientific segment, is one of the world’s largest manufacturers of analytical and spectroscopic systems and components. The HORIBA Scientific teams are committed to serving our customers with high performance products and superior technical support. Our staff of experienced application and service engineers, located around the world, provides full support for your instrument. Well-equipped application laboratories allow for sample analysis and hands-on training for new and experienced users.
For more information, visit here.
Odile Hirsch, Marketing Manager
HORIBA France SAS
14, Boulevard Thomas Gobert
CS 45002 – 91120 Palaiseau – France