Measure Thickness and Composition of Thin Films with SEM/EDS

Oxford Instruments NanoAnalysis introduces ThinFilmID for the in-situ measurement of composition and thickness of thin films down to 1nm in the SEM.

ThinFilmID uses Energy Dispersive X-ray Spectrometry (EDS) to measure the composition and thickness of layers in a thin film structure.

This technique has a unique combination of advantages that offer real benefits to customers both in terms of speed, optimisation of methods and ease of use. These benefits include:

.Spatially resolved measurements – analyse a specific point on a sample

·Excellent nano-scale lateral resolution – controlled by the interaction volume and only few hundred nm at low kV

·Measure the composition and /or thickness of the layers

·Measures layers as thin as 2nm and as thick as 1000nm

·Measure structures with up to 7 layers plus substrate with up to 16 elements.

·Unique Solvability and Simulation tool for simple optimization of data collection conditions

·Non-destructive technique with no need to cross-section structures

·Minimal sample preparation = time and cost savings

·Works with existing SEMs and INCAEnergy, no unique hardware is required

Visit www.oxford-instruments.com/thinfilmid for more information.

Press information

About : Oxford Instruments NanoAnalysis

With over 30 years of innovation, Oxford Instruments Nano-Analysis is the world’s leading supplier of analysis systems that provide detailed structural and chemical information at the nano-scale. The ability to characterize and measure at the nano-scale is fundamental from research through to commercialization.

The company’s world leading X-ray analysis and electron diffraction systems provide the critical chemical and structural information at the required scales of 1 to 100 nm, extending the capabilities of Transmission (TEM) and Scanning (SEM) Electron Microscopes. As well as meeting the current demand for materials characterization, OINA is leading the development of existing and new techniques for improved spatial resolution to meet the emerging analytical challenges within nanotechnology.

Oxford Instruments has guided the development of EDS analysis with over 30 years of hardware innovation and a rich history of technological achievement. OINA provides World class manufacturing, sales and distribution combined with global support and service.

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