Wilmington, MA –Process Monitoring and control technologies provider MKS Instruments has agreed to acquire Umetrics AB, a maker of multivariate data analysis and modeling software for semiconductor, pharmaceutical, petrochemical and manufacturing processes. Terms of the transaction were not announced. “I am pleased that our partnership with Umetrics has expanded beyond our exclusive license agreement, and they will be part of our Instruments and Control Systems product group. Through our TOOLweb platform, we have been combining MKS’ and third party process sensors for data collection and integration, and data storage and visualization with Umetrics’ multivariate analysis and modeling software,” said MKS CEO and President Leo Berlingheri. Last year, MKS and Umetrics created an advanced process control and e-diagnostics solution for semiconductor manufacturers. The deal is expected to close in the first quarter of 2006.