MKS Web-Enabled RGAs– Real Time Control and Monitoring for Vacuum Tools

Wilmington, MA- July1, 2004- MKS Instruments, Inc., a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, will introduce the IP Series of web-enabled residual gas analyzers (RGAs) at SEMICON West 2004. Usable with any of the MKS range of application-specific RGAs, “IP control” enables new process monitoring and e-diagnostics capabilities and eliminates the need for dedicated PCs.

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