Varian, Inc. (NasdaqGS: VARI) announced today an addition to its line of turbomolecular

pumping systems. The TPS-compact provides plug-and-play, hydrocarbon free,

ultra-high vacuum pumping in both bench-top and mobile models backed by a

light (max weight 19.1kg/42.1lbs.) scroll pump.

The portable, fully integrated turbo pumping system is powered by

either the Turbo-V 81 MacroTorr(TM) or Turbo-V 301 Navigator(TM) pumps,

including control and communications software, and backed by the Varian

IDP-3 Dry Scroll (60 L/min) primary pump. The ability to operate and read

the Inverted Magnetron and Full Range gauges makes the TPS-compact the most

cost-effective dry turbo-pumping system for monitoring and managing the

operating vacuum conditions. This feature also makes it ideal as a roughing

pump for ion pumped Ultra-high vacuum systems.

The size and simplicity of the unit make clean, dry, ultra-high vacuum

readily accessible for users in applications from electron microscopy to

high energy physics. For example, the TPS-compact is ideal for maintaining

vacuum in the column of an electron microscope during servicing or ensuring

purity when evacuating load-lock chambers for semiconductor manufacturing.

Additionally, the TPS-compact is the most suitable dry solution for fast

pump-down of larger machine sections or beam lines where cleanliness is

essential. The dry combination of a scroll pump and the turbo pump avoids

any contamination of the evacuated space during maintenance or operation.

The TPS-compact may be mounted in any position, making it suitable for most

system configurations.

The system is capable of pumping down small and medium volumes very

quickly and the scroll pump backing extends the life of the turbomolecular

pump, reducing its power consumption by 30%. It can be serviced on-site by

customers and is designed to be accessed easily for service. In addition to

gauge pressure, the large display also indicates when tip-seal replacement

is needed, preventing damage to the full system and especially the

turbomolecular pump.

“Varian is the only company that offers a fully dry, compact turbo

pumping system with all the advantages of having a scroll rather than a

diaphragm backing pump,” said Sergio Piras, Senior Vice President, Vacuum

Technologies, Varian, Inc. “The TPS family gives our customers the most

flexible and complete choices to meet their vacuum requirements.”

For more technical information about Varian products, please visit

https://www.varianinc.com/products/

Varian, Inc. is a leading worldwide supplier of scientific instruments

and vacuum technologies for life science and industrial applications. The

company provides complete solutions, including instruments, vacuum

products, laboratory consumable supplies, software, training and support

through its global distribution and support systems. Varian, Inc. employs

approximately 4,000 people worldwide and operates manufacturing facilities

in North America, Europe and Asia Pacific. Varian, Inc. had fiscal year

2007 sales of $921 million, and its common stock is traded on the NASDAQ

Global Select Market under the symbol, “VARI.” Further information is

available on the company’s Web site: https://www.varianinc.com.