SANTA CLARA, CA

Park Systems, world leading manufacturer of Atomic Force Microscopes (AFM) today announced Park NX20 300mm, the first and only research AFM on the market capable of scanning the entire sample area of 300 mm wafers using a 300 mm vacuum chuck while keeping the system noise level below 0.5angstrom (Å) RMS. The Park NX20 300mm system is run by SmartScan™, Park’s new operating software with automatic scan control and comes with the “Batch Mode” functionality where the users can perform recipe-automated, unlimited number of sequential multiple-site measurements over the 300 mm x 300 mm area. The automated measurements over a 300 mm wafer dramatically improve user-convenience and productivity in the industrial lab setting where comparisons within site-to-site and sample-to-sample surface morphologies (height, surface roughness measurements) are extremely important.

“Today large samples of up to 300 mm wafers and substrates are widely used for process development, failure analysis,