Product development background

Scanning electron microscopes are used in a wide range of fields, such as nanotechnology, metallurgy, semiconductors, ceramics, medicine, and biology. As advanced materials feature an increasingly smaller, finer structure, scientists are in need of ultrahigh resolution imaging as well as analysis of the advanced materials. To meet these demands, the highly regarded JSM-7610F was upgraded to achieve higher resolution imaging through an improved electron optical system. As a result, the JSM-7610FPlus has been debuted.
The JSM-7610FPlus successfully combines ultrahigh resolution imaging and high spatial resolution analysis, with an efficient combination of the semi-in-lens objective lens and the in-lens Schottky field emission electron gun providing a large probe current with high stability.

Main Features

• Semi-in-lens objective lens allowing high spatial resolution
  The JSM-7610FPlus incorporates the semi-in-lens objective lens capable of finely focusing an electron probe, thus enabling high resolution to be obtained at low accelerating voltages.
• GENTLEBEAM™mode for the surface observation at low accelerating voltages
  GENTLEBEAM™mode (GB mode) is a function to decelerate the electron probe just above the specimen, by applying a bias voltage to the specimen. This mode is very suitable for observation and analysis at low accelerating voltages.
• Energy filtering with the “r-filter”
  Electrons are generated from the specimen when irradiated with the electron probe. The r-filter is used to filter those electrons to selectively detect the secondary- or backscattered electrons.
• Low-angle backscattered electron image acquired with LABE detector (option)
  The LABE (Low Angle BE (backscattered electron)) detector is capable of detecting low-energy backscattered electrons at low angles. The detailed topographic information on the specimen surface can be obtained at low accelerating voltages, whereas the composition of the specimen can be observed at high accelerating voltages.
• High Power Optics
  The in-lens Schottky field emission electron gun that provides a large probe current with high stability, and the aperture angle control lens (ACL) that automatically optimizes the electron probe diameter over all the probe current range, are successfully combined. This superb capability achieves stable observation and analysis.
• Various attachments to meet diversified needs
  The JSM-7610FPlus accommodates various attachments, including EDS (energy dispersive X-ray spectrometer), WDS (wavelength dispersive X-ray spectrometer), CL (cathodoluminescence detector) and other analytical detectors, thus responding to diversified analytical needs.

Main Specifications

Annual unit sales target

50 units/year

LINK

• Products
  JSM-7610FPlus Schottky Field Emission Scanning Electron Microscope