Soluris Earns #1 Process Diagnostics Ranking in VLSI Research Customer Satisfaction Survey

Soluris, a manufacturer of CD-SEM and optical overlay and CD metrology systems, announced today that it has been named the number one process diagnostics equipment supplier on the VLSI Research 10 BEST Suppliers of 2005 Customer Satisfaction Survey. The 2005 award marks the third consecutive year in which Soluris has ranked number one on the 10 BEST process diagnostics list, and it is the sixth consecutive year that Soluris has placed in the top four on the list. Soluris received top marks among process diagnostics suppliers in 10 out of the 13 categories with an average score of 8.48 out of a possible 10 and an average rating of 9.3 in the critical uptime category. The 10 BEST awards are based on surveys solicited anonymously from customers and are presented annually to suppliers in the semiconductor manufacturing industry. “For Soluris to claim the #1 position for the third straight year is an outstanding achievement” stated G. Dan Hutcheson, CEO of VLSI Research. ”This demonstrates a long-term commitment to their customers, who have continued to rank them at better than 8 points out of 10 for each of these years. A long-term leadership position in the 10 BEST award can be achieved only with consistently outstanding product quality and customer support.” “We are honored to receive this award again, because it is based on exceptionally high ratings from our customers,” said Alain Bojarski, president and CEO of Soluris. “As a focused metrology company, we believe that our ability to be responsive to our customers’ needs is our most important strategic advantage. Whether that need is as challenging as developing a new technology, or as simple as answering a telephone call, they are equally critical to our success. This award tells us that we are succeeding in keeping our customers happy.” The Soluris product family is technically unique. The Yosemite™ SP-1000 is the only CD-SEM to combine Critical Shape Metrology™ and Ultra Low Voltageä. Critical Shape Metrology™, a model-based measurement algorithm, offers highly accurate and precise 3D shape information. Ultra Low Voltage (<200 eV) improves accuracy and eliminates resist slimming. Soluris also provides the IVS 155™ optical overlay and CD metrology system for unsurpassed performance and reliability. The IVS 155 and Yosemite CD-SEM both offer the lowest cost-of-ownership.

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