Ellipsometry is a spectroscopic technique used to measure dielectric properties of thin films. Spectroscopic ellipsometry (SE), in particular, can provide a wealth of information. The rapid development of a number of industries in which SE is used is helping to drive growth in what is a fairly competitive instrument market.

Ellipsometry is the analysis of the change in the state of polarized light after it has reflected from the surface of a thin film sample. It is an ideal method for analyzing transparent and semi-transparent films from a few angstroms to several micrometers thick. SE, as opposed to single-wavelength or laser ellipsometry, utilizes broadband light sources within the infrared, UV and visible regions. While SE is not as suitable as laser ellipsometry for imaging applications, it can analyze complex multilayer films. Laser ellipsometry is limited to single-layer analysis. In fact, SE can provide a plethora of information about a sample in addition to film thickness, such as extinction coefficient, refractive index and anisotropy. This makes SE much more preferable for laboratory research, compared with laser ellipsometry or reflectometers, which are typically used for quality analysis and on-the-floor product inspection.

The semiconductor industry is the largest area of industrial demand for SE. The incorporation of new “high k” materials, developed as a replacement for silicon dioxide technology to allow further miniaturization, and the progression to 300 mm wafers has necessitated the development of improved metrology tools, including revamped SE instruments. In addition, the rapid growth of the flat-panel LCD industry, which utilizes thin films, has been a boon to SE demand from the electronics sector. Newly developed electronic technologies, such as organic electroluminescent displays, are also driving growth in demand.

Another area that is in the midst of particularly strong growth is the photovoltaics industry. SE has also begun to see significant use in biotechnology for the development of biofilms, although this is still a niche market. There is also some use of SE instruments in the paints and coatings market for very specific applications.

The global market for SE was valued at well over $40 million in 2010, following a strong post-recession rebound, and accounts for about two-thirds of the entire laboratory ellipsometry market. Despite the current economic malaise, the market is expected to experience mid-teens growth in 2011 thanks to the combination of high-growth industries and the current up-cycle of the semiconductor industry. While a number of smaller, independent vendors, such as J.A. Woollam and SENTECH, are still among the major competitors, the market is increasingly dominated by large multinationals such as HORIBA and SOPRALAB. ULVAC also recently entered the market.

Laboratory Asset Management at a Glance:

Leading Suppliers

• Thermo Fisher Scientific

• Agilent

• PerkinElmer

Largest Markets

• Pharmaceutical

• Biotechnology

• CRO

Service Cost

• $50,000–$500,000