Oberkochen, Germany —Carl Zeiss SMT (Semiconductor Manufacturing Technologies)

AG, a manufacturer of light optical systems for semiconductor production,

has merged with its LEO Electron Microscopy Group subsidiary, which makes

and sells electron microscopes, to form a new Nanotechnology Systems Division.

“With this step we are accomplishing the complete integration of electron beam

technology into the Carl Zeiss SMT portfolio,” said LEO Group CEO Dr. Dirk

Stenkamp. ”All electron beam, ion beam and other analysis technologies, as well

as applications in materials analysis, life sciences and semiconductor technology

will be consistently sustained and expanded.” Carl Zeiss SMT AG President and

CEO Dr. Hermann Gerlinger noted that “utilization of international distribution

channels and the service network of the Nanotechnology Systems Division will

deliver a strong synergy effect for selected products in the Semiconductor Metrology

Systems Division—which will immediately benefit our customers.”